Inventor

HONTAKE KOUICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HONTAKE KOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HONTAKE KOUICHI

2 patents

US8757089B2Jun 24, 2014

Coating and developing apparatus, coating and developing method, and storage medium

HONTAKE KOUICHI2 citations56

US8163469B2Apr 24, 2012

Coating and developing apparatus, coating and developing method, and storage medium

HONTAKE KOUICHI2 citations56

TOKYO ELECTRON LTD

1 patent

US8010221B2Aug 30, 2011

Cleaning apparatus and method for immersion light exposure

TOKYO ELECTRON LTD6 citations60