Inventor
MULCKHUYSE WOUTER FRANS WILLEM
NL6 patents
⚠️ This page may combine multiple inventors who share the name “MULCKHUYSE WOUTER FRANS WILLEM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7317510B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations78
US10928736B2Feb 23, 2021
Method and apparatus for direct write maskless lithography
ASML NETHERLANDS BV2 citations68
US8049865B2Nov 1, 2011
Lithographic system, device manufacturing method, and mask optimization method
ASML NETHERLANDS BV3 citations60
US7209216B2Apr 24, 2007
Lithographic apparatus and device manufacturing method utilizing dynamic correction for magnification and position in maskless lithography
ASML NETHERLANDS BV4 citations58
US9488921B2Nov 8, 2016
Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program
ASML NETHERLANDS BV0 citations39