Inventor

MUKA RICHARD

US3 patents

⚠️ This page may combine multiple inventors who share the name “MUKA RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBIS TECHNOLOGY CORP

1 patent

US6863736B2Mar 8, 2005

Shaft cooling mechanisms

IBIS TECHNOLOGY CORP10 citations70

FAIRHURST JOHN ROBERT

1 patent

US8585115B2Nov 19, 2013

Method and apparatus for lifting a horizontally-oriented substrate from a cassette

FAIRHURST JOHN ROBERT6 citations68

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7595972B2Sep 29, 2009

Clamp for use in processing semiconductor workpieces

VARIAN SEMICONDUCTOR EQUIPMENT3 citations60