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Inventor
DEVARAPALLI VAMSI K
US
2 patents
Patents
2 patents
US8822340B2
Sep 2, 2014
Abrasive compositions for chemical mechanical polishing and methods for using same
RHODIA OPERATIONS
7 citations
80
US8366959B2
Feb 5, 2013
Abrasive compositions for chemical mechanical polishing and methods for using same
RHODIA OPERATIONS
9 citations
80