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Inventor
LEE UNJOO
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “LEE UNJOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIM MOOJIN
1 patent
US9490107B2
Nov 8, 2016
Plasma apparatus and method of fabricating semiconductor device using the same
KIM MOOJIN
55 citations
89
SAMSUNG ELECTRONICS CO LTD
1 patent
US9704690B2
Jul 11, 2017
Plasma apparatus and method of operating the same
SAMSUNG ELECTRONICS CO LTD
10 citations
79