Inventor
NOZOE MARI
JP73 patents
⚠️ This page may combine multiple inventors who share the name “NOZOE MARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
43 patentsUS6583413B1Jun 24, 2003
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD123 citations99
US6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US5986263ANov 16, 1999
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD164 citations99
US6759655B2Jul 6, 2004
Inspection method, apparatus and system for circuit pattern
HITACHI LTD74 citations98
US6700122B2Mar 2, 2004
Wafer inspection system and wafer inspection process using charged particle beam
HITACHI LTD88 citations97
US6952492B2Oct 4, 2005
Method and apparatus for inspecting a semiconductor device
HITACHI LTD50 citations96
US6919564B2Jul 19, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6838667B2Jan 4, 2005
Method and apparatus for charged particle beam microscopy
HITACHI LTD59 citations96
US6797954B2Sep 28, 2004
Patterned wafer inspection method and apparatus therefor
HITACHI LTD42 citations96
US6661507B2Dec 9, 2003
Pattern inspecting system and pattern inspecting method
HITACHI LTD47 citations96
US6583634B1Jun 24, 2003
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD68 citations96
US6583414B2Jun 24, 2003
Method of inspecting pattern and inspecting instrument
HITACHI LTD52 citations96
US6542830B1Apr 1, 2003
Process control system
HITACHI LTD93 citations96
US6493082B2Dec 10, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD35 citations96
US6480279B2Nov 12, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6476390B1Nov 5, 2002
Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams
HITACHI LTD68 citations96
US6476913B1Nov 5, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD59 citations96
US6421122B2Jul 16, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD51 citations96
US6388747B2May 14, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD62 citations96
US6347150B1Feb 12, 2002
Method and system for inspecting a pattern
HITACHI LTD52 citations96
US6172365B1Jan 9, 2001
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD48 citations96
US6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US7116816B2Oct 3, 2006
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen
HITACHI LTD41 citations93
US7098455B2Aug 29, 2006
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD26 citations93
US6979823B2Dec 27, 2005
Patterned wafer inspection method and apparatus therefor
HITACHI LTD21 citations93
US6975754B2Dec 13, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD19 citations93
US6898305B2May 24, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD40 citations93
US6717142B2Apr 6, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD16 citations93
US6373054B2Apr 16, 2002
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD23 citations93
US6246472B1Jun 12, 2001
Pattern inspecting system and pattern inspecting method
HITACHI LTD26 citations93
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6903821B2Jun 7, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD15 citations92
US6753524B2Jun 22, 2004
Inspection system and inspection process for wafer with circuit using charged-particle beam
HITACHI LTD23 citations92
US6703850B2Mar 9, 2004
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD37 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US6236057B1May 22, 2001
Method of inspecting pattern and apparatus thereof with a differential brightness image detection
HITACHI LTD15 citations92
US6757621B2Jun 29, 2004
Process management system
HITACHI LTD35 citations91
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US7397031B2Jul 8, 2008
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD10 citations84
US6853204B2Feb 8, 2005
Wafer inspection method of charging wafer with a charged particle beam then measuring electric properties thereof, and inspection device based thereon
HITACHI LTD14 citations84
US6859060B2Feb 22, 2005
Inspection method of semiconductor device and inspection system
HITACHI LTD14 citations82
HITACHI HIGH TECH CORP
4 patentsUS7211797B2May 1, 2007
Inspection method and inspection system using charged particle beam
HITACHI HIGH TECH CORP28 citations93
US7019294B2Mar 28, 2006
Inspection method and apparatus using charged particle beam
HITACHI HIGH TECH CORP32 citations92
US7521679B2Apr 21, 2009
Inspection method and inspection system using charged particle beam
HITACHI HIGH TECH CORP10 citations84
US7394070B2Jul 1, 2008
Method and apparatus for inspecting patterns
HITACHI HIGH TECH CORP14 citations83
(unassigned)
1 patentRENESAS TECH CORP
1 patentNOZOE MARI
1 patentShowing the top 50 of 73 patents by PatentIndex Score.