Inventor
KURODA KATSUHIRO
JP46 patents
⚠️ This page may combine multiple inventors who share the name “KURODA KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
40 patentsUS6511428B1Jan 28, 2003
Ultrasonic medical treating device
HITACHI LTD270 citations99
US6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US5412210AMay 2, 1995
Scanning electron microscope and method for production of semiconductor device by using the same
HITACHI LTD148 citations99
US6518548B2Feb 11, 2003
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD269 citations98
US6394797B1May 28, 2002
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD182 citations98
US5481109AJan 2, 1996
Surface analysis method and apparatus for carrying out the same
HITACHI LTD121 citations98
US6797954B2Sep 28, 2004
Patterned wafer inspection method and apparatus therefor
HITACHI LTD42 citations96
US6476390B1Nov 5, 2002
Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams
HITACHI LTD68 citations96
US6114695ASep 5, 2000
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD62 citations96
US6051834AApr 18, 2000
Electron microscope
HITACHI LTD65 citations96
US5969357AOct 19, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD43 citations96
US5866905AFeb 2, 1999
Electron microscope
HITACHI LTD74 citations96
US5866904AFeb 2, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD42 citations96
US5594245AJan 14, 1997
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD71 citations96
US6979823B2Dec 27, 2005
Patterned wafer inspection method and apparatus therefor
HITACHI LTD21 citations93
US5936244AAug 10, 1999
Electron microscope and electron microscopy method
HITACHI LTD23 citations93
US5838096ANov 17, 1998
Cathode having a reservoir and method of manufacturing the same
HITACHI LTD40 citations93
US5666053ASep 9, 1997
Charged particle beam apparatus for measuring magnetic field
HITACHI LTD25 citations93
US5616926AApr 1, 1997
Schottky emission cathode and a method of stabilizing the same
HITACHI LTD43 citations93
US5475218ADec 12, 1995
Instrument and method for 3-dimensional atomic arrangement observation
HITACHI LTD21 citations93
US5278408AJan 11, 1994
Instrument and method for 3-dimensional atomic arrangement observation
HITACHI LTD27 citations93
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US5877498AMar 2, 1999
Method and apparatus for X-ray analyses
HITACHI LTD42 citations92
US5594246AJan 14, 1997
Method and apparatus for x-ray analyses
HITACHI LTD21 citations92
US5552602ASep 3, 1996
Electron microscope
HITACHI LTD41 citations92
US5490193AFeb 6, 1996
X-ray computed tomography system
HITACHI LTD50 citations92
US5162240ANov 10, 1992
Method and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrate
HITACHI LTD47 citations92
US4658136AApr 14, 1987
Secondary electron detecting apparatus
HITACHI LTD30 citations91
US5681112AOct 28, 1997
Image enhancement
HITACHI LTD23 citations90
US5763880AJun 9, 1998
Cathode, electron beam emission apparatus using the same, and method of manufacturing the cathode
HITACHI LTD33 citations87
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US7242015B2Jul 10, 2007
Patterned wafer inspection method and apparatus therefor
HITACHI LTD6 citations74
US5811819ASep 22, 1998
Electron beam source and its manufacturing method and electron beam source apparatus and electron beam apparatus using the same
HITACHI LTD10 citations74
US4893009AJan 9, 1990
Scanning electron microscope and the like apparatus
HITACHI LTD17 citations74
US4396901AAug 2, 1983
Method for correcting deflection distortion in an apparatus for charged particle lithography
HITACHI LTD11 citations74
US4475044AOct 2, 1984
Apparatus for focus-deflecting a charged particle beam
HITACHI LTD15 citations73
US4939045AJul 3, 1990
Magnetic recording medium
HITACHI LTD5 citations62
HITACHI MEDICAL CORP
4 patentsUS5267294ANov 30, 1993
Radiotherapy apparatus
HITACHI MEDICAL CORP121 citations97
US5561697AOct 1, 1996
Microtron electron accelerator
HITACHI MEDICAL CORP52 citations95
US7299741B2Nov 27, 2007
Hydraulic pressure actuator and continuous manual athletic device using the same
HITACHI MEDICAL CORP10 citations78
US5399873AMar 21, 1995
Microtron electron accelerator
HITACHI MEDICAL CORP5 citations61