Inventor
KITAGAWA DAI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KITAGAWA DAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS10199246B2Feb 5, 2019
Temperature control mechanism, temperature control method and substrate processing apparatus
TOKYO ELECTRON LTD44 citations93
US10512125B2Dec 17, 2019
Mounting table and substrate processing apparatus
TOKYO ELECTRON LTD7 citations82
US11705302B2Jul 18, 2023
Substrate support and plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US10679869B2Jun 9, 2020
Placing table and plasma treatment apparatus
TOKYO ELECTRON LTD2 citations71
US11756807B2Sep 12, 2023
Power feeding mechanism and method for controlling temperature of a stage
TOKYO ELECTRON LTD0 citations60
US11373884B2Jun 28, 2022
Placing table and plasma treatment apparatus
TOKYO ELECTRON LTD1 citations60
US11121009B2Sep 14, 2021
Power feeding mechanism and method for controlling temperature of a stage
TOKYO ELECTRON LTD1 citations60
US12463021B2Nov 4, 2025
Substrate processing apparatus and maintenance method for substrate processing apparatus
TOKYO ELECTRON LTD0 citations56
US11756806B2Sep 12, 2023
Heater power feeding mechanism
TOKYO ELECTRON LTD0 citations51
US11743973B2Aug 29, 2023
Placing table and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US10593522B2Mar 17, 2020
Electrostatic chuck, placing table and plasma processing apparatus
TOKYO ELECTRON LTD0 citations41
US10374358B2Aug 6, 2019
Feeder-cover structure and semiconductor production apparatus
TOKYO ELECTRON LTD0 citations38