Inventor
MCGOVERN RICHARD
US4 patents
Patents
4 patentsUS5484486AJan 16, 1996
Quick release process kit
APPLIED MATERIALS INC23 citations90
US5693179ADec 2, 1997
Contaminant reduction improvements for plasma etch chambers
APPLIED MATERIALS INC18 citations89
US5716484AFeb 10, 1998
Contaminant reduction improvements for plasma etch chambers
APPLIED MATERIALS INC8 citations71
US5480052AJan 2, 1996
Domed extension for process chamber electrode
APPLIED MATERIALS INC12 citations67