P

Inventor

KANEKO YUTAKA

JP142 patents
⚠️ This page may combine multiple inventors who share the name “KANEKO YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

17 patents
US6583413B1Jun 24, 2003

Method of inspecting a circuit pattern and inspecting instrument

HITACHI LTD123 citations99
US6329826B1Dec 11, 2001

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD95 citations99
US6172363B1Jan 9, 2001

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD185 citations99
US6518548B2Feb 11, 2003

Substrate temperature control system and method for controlling temperature of substrate

HITACHI LTD269 citations98
US6394797B1May 28, 2002

Substrate temperature control system and method for controlling temperature of substrate

HITACHI LTD182 citations98
US6348690B1Feb 19, 2002

Method and an apparatus of an inspection system using an electron beam

HITACHI LTD51 citations96
US7098455B2Aug 29, 2006

Method of inspecting a circuit pattern and inspecting instrument

HITACHI LTD26 citations93
US7417444B2Aug 26, 2008

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD25 citations92
US7026830B2Apr 11, 2006

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD19 citations92
US6559663B2May 6, 2003

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD20 citations92
US6452178B2Sep 17, 2002

Method and an apparatus of an inspection system using an electron beam

HITACHI LTD23 citations92
US7952074B2May 31, 2011

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD8 citations84
US7397031B2Jul 8, 2008

Method of inspecting a circuit pattern and inspecting instrument

HITACHI LTD10 citations84
US6987265B2Jan 17, 2006

Method and an apparatus of an inspection system using an electron beam

HITACHI LTD9 citations82
US7439506B2Oct 21, 2008

Method and an apparatus of an inspection system using an electron beam

HITACHI LTD3 citations74
US7012252B2Mar 14, 2006

Method and an apparatus of an inspection system using an electron beam

HITACHI LTD5 citations74
US6512227B2Jan 28, 2003

Method and apparatus for inspecting patterns of a semiconductor device with an electron beam

HITACHI LTD10 citations74

TETRA LAVAL HOLDINGS & FINANCE

11 patents

RICOH KK

8 patents

KONISHIROKU PHOTO IND

4 patents

NISSAN MOTOR

2 patents

KONNO HIDETOSHI

2 patents

HAYASHI TAKAHITO

2 patents

RICOH COMPANY LTD AND NIPPON T

1 patent

MEGUMI IDE

1 patent

NAT SPACE DEV AGENCY

1 patent

SANYO ELECTRIC CO

1 patent

Showing the top 50 of 142 patents by PatentIndex Score.