Inventor
MAEDA SHUNJI
JP170 patents
⚠️ This page may combine multiple inventors who share the name “MAEDA SHUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
32 patentsUS6947587B1Sep 20, 2005
Defect inspection method and apparatus
HITACHI LTD88 citations99
US6621571B1Sep 16, 2003
Method and apparatus for inspecting defects in a patterned specimen
HITACHI LTD149 citations99
US6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US5774222AJun 30, 1998
Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected
HITACHI LTD167 citations99
US6753972B1Jun 22, 2004
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
HITACHI LTD87 citations98
US6690469B1Feb 10, 2004
Method and apparatus for observing and inspecting defects
HITACHI LTD98 citations98
US6587581B1Jul 1, 2003
Visual inspection method and apparatus therefor
HITACHI LTD118 citations98
US6556290B2Apr 29, 2003
Defect inspection method and apparatus therefor
HITACHI LTD75 citations98
US6169282B1Jan 2, 2001
Defect inspection method and apparatus therefor
HITACHI LTD107 citations98
US6091075AJul 18, 2000
Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus
HITACHI LTD99 citations98
US7020350B2Mar 28, 2006
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections
HITACHI LTD42 citations96
US6800859B1Oct 5, 2004
Method and equipment for detecting pattern defect
HITACHI LTD55 citations96
US6799130B2Sep 28, 2004
Inspection method and its apparatus, inspection system
HITACHI LTD56 citations96
US6762831B2Jul 13, 2004
Method and apparatus for inspecting defects
HITACHI LTD45 citations96
US6456951B1Sep 24, 2002
Method and apparatus for processing inspection data
HITACHI LTD58 citations96
US6404498B1Jun 11, 2002
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected
HITACHI LTD38 citations96
US6400454B1Jun 4, 2002
Apparatus and method for inspector defects
HITACHI LTD67 citations96
US6263099B1Jul 17, 2001
Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected
HITACHI LTD56 citations96
US6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US5649022AJul 15, 1997
Pattern checking method and checking apparatus
HITACHI LTD79 citations96
US5430548AJul 4, 1995
Method and apparatus for pattern detection
HITACHI LTD70 citations96
US5309108AMay 3, 1994
Method of inspecting thin film transistor liquid crystal substrate and apparatus therefor
HITACHI LTD89 citations96
US5153444AOct 6, 1992
Method and apparatus for detecting patterns
HITACHI LTD92 citations96
US4791586ADec 13, 1988
Method of and apparatus for checking geometry of multi-layer patterns for IC structures
HITACHI LTD99 citations96
US4725722AFeb 16, 1988
Automatic focusing method and apparatus utilizing contrasts of projected pattern
HITACHI LTD57 citations96
US7274813B2Sep 25, 2007
Defect inspection method and apparatus
HITACHI LTD18 citations93
US7221486B2May 22, 2007
Method and apparatus for picking up 2D image of an object to be sensed
HITACHI LTD33 citations93
US7218389B2May 15, 2007
Method and apparatus for inspecting pattern defects
HITACHI LTD24 citations93
US7161671B2Jan 9, 2007
Method and apparatus for inspecting defects
HITACHI LTD16 citations93
US7142708B2Nov 28, 2006
Defect detection method and its apparatus
HITACHI LTD31 citations93
US7142294B2Nov 28, 2006
Method and apparatus for detecting defects
HITACHI LTD22 citations93
HITACHI HIGH TECH CORP
17 patentsUS7388979B2Jun 17, 2008
Method and apparatus for inspecting pattern defects
HITACHI HIGH TECH CORP136 citations99
US7465935B2Dec 16, 2008
Method for inspecting pattern defect and device for realizing the same
HITACHI HIGH TECH CORP45 citations96
US7333192B2Feb 19, 2008
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP37 citations96
US6900888B2May 31, 2005
Method and apparatus for inspecting a pattern formed on a substrate
HITACHI HIGH TECH CORP38 citations96
US8005292B2Aug 23, 2011
Method and apparatus for inspecting pattern defects
HITACHI HIGH TECH CORP17 citations93
US7848563B2Dec 7, 2010
Method and apparatus for inspecting a defect of a pattern
HITACHI HIGH TECH CORP18 citations93
US7792352B2Sep 7, 2010
Method and apparatus for inspecting pattern defects
HITACHI HIGH TECH CORP17 citations93
US7751036B2Jul 6, 2010
Apparatus of inspecting defect in semiconductor and method of the same
HITACHI HIGH TECH CORP14 citations93
US7714997B2May 11, 2010
Apparatus for inspecting defects
HITACHI HIGH TECH CORP22 citations93
US7664608B2Feb 16, 2010
Defect inspection method and apparatus
HITACHI HIGH TECH CORP37 citations93
US7599545B2Oct 6, 2009
Method and its apparatus for inspecting defects
HITACHI HIGH TECH CORP27 citations93
US7528942B2May 5, 2009
Method and apparatus for detecting defects
HITACHI HIGH TECH CORP32 citations93
US7508973B2Mar 24, 2009
Method of inspecting defects
HITACHI HIGH TECH CORP37 citations93
US7474394B2Jan 6, 2009
Apparatus of inspecting defect in semiconductor and method of the same
HITACHI HIGH TECH CORP27 citations93
US7433508B2Oct 7, 2008
Pattern inspection method and its apparatus
HITACHI HIGH TECH CORP21 citations93
US7400393B2Jul 15, 2008
Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen
HITACHI HIGH TECH CORP28 citations93
US7205549B2Apr 17, 2007
Pattern defect inspection method and its apparatus
HITACHI HIGH TECH CORP20 citations93
MAEDA SHUNJI
1 patentShowing the top 50 of 170 patents by PatentIndex Score.