P

Inventor

KUBOTA HITOSHI

JP111 patents
⚠️ This page may combine multiple inventors who share the name “KUBOTA HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

20 patents
US6329826B1Dec 11, 2001

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD95 citations99
US6172363B1Jan 9, 2001

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD185 citations99
US5774222AJun 30, 1998

Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected

HITACHI LTD167 citations99
US6404498B1Jun 11, 2002

Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected

HITACHI LTD38 citations96
US6263099B1Jul 17, 2001

Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected

HITACHI LTD56 citations96
US5649022AJul 15, 1997

Pattern checking method and checking apparatus

HITACHI LTD79 citations96
US5430548AJul 4, 1995

Method and apparatus for pattern detection

HITACHI LTD70 citations96
US5309108AMay 3, 1994

Method of inspecting thin film transistor liquid crystal substrate and apparatus therefor

HITACHI LTD89 citations96
US5293538AMar 8, 1994

Method and apparatus for the inspection of defects

HITACHI LTD80 citations96
US5153444AOct 6, 1992

Method and apparatus for detecting patterns

HITACHI LTD92 citations96
US4791586ADec 13, 1988

Method of and apparatus for checking geometry of multi-layer patterns for IC structures

HITACHI LTD99 citations96
US4725722AFeb 16, 1988

Automatic focusing method and apparatus utilizing contrasts of projected pattern

HITACHI LTD57 citations96
US7417444B2Aug 26, 2008

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD25 citations92
US7026830B2Apr 11, 2006

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD19 citations92
US6559663B2May 6, 2003

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD20 citations92
US5229607AJul 20, 1993

Combination apparatus having a scanning electron microscope therein

HITACHI LTD47 citations92
US4814615AMar 21, 1989

Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure

HITACHI LTD31 citations92
US7952074B2May 31, 2011

Method and apparatus for inspecting integrated circuit pattern

HITACHI LTD8 citations84
US6317512B1Nov 13, 2001

Pattern checking method and checking apparatus

HITACHI LTD16 citations84
US5157735AOct 20, 1992

Chipping detection system and method

HITACHI LTD12 citations74

NISSAN MOTOR

6 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

4 patents

RENESAS TECH CORP

2 patents

KAI TADASHI

2 patents

TOSHIBA KK

2 patents

NEC CORP

1 patent

UNISIA JECS CORP

1 patent

HITACHI HIGH TECH CORP

1 patent

NAT INST OF ADVANCED IND SCIEN

1 patent

TANABE SEIYAKU CO

1 patent

DAIBOU TADAOMI

1 patent

SONY CORP

1 patent

MITSUBISHI ELECTRIC CORP

1 patent

MITSUBISHI TANABE PHARMA CORP

1 patent

ROHM CO LTD

1 patent

CANON ANELVA CORP

1 patent

FUKUSHIMA AKIO

1 patent

OKAMOTO MASAKI

1 patent

KUBOTA HITOSHI

1 patent

Showing the top 50 of 111 patents by PatentIndex Score.