Inventor
SUGIMOTO ARITOSHI
JP42 patents
⚠️ This page may combine multiple inventors who share the name “SUGIMOTO ARITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
35 patentsUS6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US5986263ANov 16, 1999
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD164 citations99
US6771077B2Aug 3, 2004
Method of testing electronic devices indicating short-circuit
HITACHI LTD85 citations98
US6734687B1May 11, 2004
Apparatus for detecting defect in device and method of detecting defect
HITACHI LTD134 citations98
US6760472B1Jul 6, 2004
Identification method for an article using crystal defects
HITACHI LTD69 citations96
US6583634B1Jun 24, 2003
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD68 citations96
US6347150B1Feb 12, 2002
Method and system for inspecting a pattern
HITACHI LTD52 citations96
US6172365B1Jan 9, 2001
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD48 citations96
US6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US7133550B2Nov 7, 2006
Pattern inspection method and apparatus
HITACHI LTD19 citations93
US6717142B2Apr 6, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD16 citations93
US6373054B2Apr 16, 2002
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD23 citations93
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6703850B2Mar 9, 2004
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD37 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US6365425B1Apr 2, 2002
Method of manufacturing semiconductor device
HITACHI LTD26 citations92
US6291847B1Sep 18, 2001
Semiconductor integrated circuit device and process for manufacturing the same
HITACHI LTD30 citations92
US6236057B1May 22, 2001
Method of inspecting pattern and apparatus thereof with a differential brightness image detection
HITACHI LTD15 citations92
US5877498AMar 2, 1999
Method and apparatus for X-ray analyses
HITACHI LTD42 citations92
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US7266235B2Sep 4, 2007
Pattern inspection method and apparatus
HITACHI LTD10 citations84
US6828554B2Dec 7, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD11 citations82
US7957579B2Jun 7, 2011
Pattern inspection method and apparatus
HITACHI LTD5 citations74
US7894658B2Feb 22, 2011
Pattern inspection method and apparatus
HITACHI LTD4 citations74
US7457453B2Nov 25, 2008
Pattern inspection method and apparatus
HITACHI LTD4 citations74
US7122796B2Oct 17, 2006
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD4 citations74
US6376854B2Apr 23, 2002
Method of inspecting a pattern on a substrate
HITACHI LTD8 citations74
US7301146B2Nov 27, 2007
Probe driving method, and probe apparatus
HITACHI LTD8 citations73
US6895346B2May 17, 2005
Method for test conditions
HITACHI LTD10 citations73
US6780660B2Aug 24, 2004
System for testing electronic devices
HITACHI LTD9 citations73
US6770496B2Aug 3, 2004
Method of testing electronic devices
HITACHI LTD8 citations73
US6573546B2Jun 3, 2003
Semiconductor integrated circuit device and process for manufacturing the same
HITACHI LTD2 citations63
US6841405B2Jan 11, 2005
Photomask for test wafers
HITACHI LTD0 citations51