Inventor
SUGIYAMA KATSUYA
JP20 patents
⚠️ This page may combine multiple inventors who share the name “SUGIYAMA KATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
16 patentsUS6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US6797954B2Sep 28, 2004
Patterned wafer inspection method and apparatus therefor
HITACHI LTD42 citations96
US6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US6979823B2Dec 27, 2005
Patterned wafer inspection method and apparatus therefor
HITACHI LTD21 citations93
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US6452178B2Sep 17, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD23 citations92
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US6987265B2Jan 17, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD9 citations82
US7439506B2Oct 21, 2008
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD3 citations74
US7242015B2Jul 10, 2007
Patterned wafer inspection method and apparatus therefor
HITACHI LTD6 citations74
US7012252B2Mar 14, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD5 citations74
US6512227B2Jan 28, 2003
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam
HITACHI LTD10 citations74
US7232996B2Jun 19, 2007
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD0 citations52