Inventor
YOSHIMURA KAZUSHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIMURA KAZUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
12 patentsUS6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US5883437AMar 16, 1999
Method and apparatus for inspection and correction of wiring of electronic circuit and for manufacture thereof
HITACHI LTD175 citations97
US5781294AJul 14, 1998
Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen
HITACHI LTD77 citations94
US4772125ASep 20, 1988
Apparatus and method for inspecting soldered portions
HITACHI LTD82 citations94
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US6831998B1Dec 14, 2004
Inspection system for circuit patterns and a method thereof
HITACHI LTD26 citations90
US5301248AApr 5, 1994
Method for pattern inspection and apparatus therefor
HITACHI LTD40 citations89
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US4556797ADec 3, 1985
Method and apparatus for detecting edge of fine pattern on specimen
HITACHI LTD11 citations74