Inventor
USAMI YASUTSUGU
JP48 patents
⚠️ This page may combine multiple inventors who share the name “USAMI YASUTSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
41 patentsUS6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US6107637AAug 22, 2000
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD147 citations99
US6759655B2Jul 6, 2004
Inspection method, apparatus and system for circuit pattern
HITACHI LTD74 citations98
US6310341B1Oct 30, 2001
Projecting type charged particle microscope and projecting type substrate inspection system
HITACHI LTD108 citations98
US7692144B2Apr 6, 2010
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD42 citations96
US6919564B2Jul 19, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6797954B2Sep 28, 2004
Patterned wafer inspection method and apparatus therefor
HITACHI LTD42 citations96
US6753518B2Jun 22, 2004
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD35 citations96
US6635873B1Oct 21, 2003
Scanning electron microscope with voltage applied to the sample
HITACHI LTD45 citations96
US6493082B2Dec 10, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD35 citations96
US6480279B2Nov 12, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6476913B1Nov 5, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD59 citations96
US6421122B2Jul 16, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD51 citations96
US6388747B2May 14, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD62 citations96
US6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US6333510B1Dec 25, 2001
Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus
HITACHI LTD44 citations96
US6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US7329889B2Feb 12, 2008
Electron beam apparatus and method with surface height calculator and a dual projection optical unit
HITACHI LTD17 citations93
US6979823B2Dec 27, 2005
Patterned wafer inspection method and apparatus therefor
HITACHI LTD21 citations93
US6919577B2Jul 19, 2005
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD25 citations93
US5478195ADec 26, 1995
Process and apparatus for transferring an object and for processing semiconductor wafers
HITACHI LTD48 citations93
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6903821B2Jun 7, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD15 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US6509564B1Jan 21, 2003
Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method
HITACHI LTD39 citations92
US6452178B2Sep 17, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD23 citations92
US6236057B1May 22, 2001
Method of inspecting pattern and apparatus thereof with a differential brightness image detection
HITACHI LTD15 citations92
US7977632B2Jul 12, 2011
Scanning electron microscope
HITACHI LTD8 citations84
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US6987265B2Jan 17, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD9 citations82
US7442923B2Oct 28, 2008
Scanning electron microscope
HITACHI LTD5 citations74
US7439506B2Oct 21, 2008
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD3 citations74
US7242015B2Jul 10, 2007
Patterned wafer inspection method and apparatus therefor
HITACHI LTD6 citations74
US7012252B2Mar 14, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD5 citations74
US6768113B2Jul 27, 2004
Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method
HITACHI LTD7 citations74
US6512227B2Jan 28, 2003
Method and apparatus for inspecting patterns of a semiconductor device with an electron beam
HITACHI LTD10 citations74
US6504609B2Jan 7, 2003
Inspection method, apparatus and system for circuit pattern
HITACHI LTD7 citations74
US6376854B2Apr 23, 2002
Method of inspecting a pattern on a substrate
HITACHI LTD8 citations74
US7232996B2Jun 19, 2007
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD0 citations52
HITACHI HIGH TECH CORP
3 patentsUS7038767B2May 2, 2006
Three-dimensional micropattern profile measuring system and method
HITACHI HIGH TECH CORP3 citations62
US6894790B2May 17, 2005
Micropattern shape measuring system and method
HITACHI HIGH TECH CORP2 citations61
US7130063B2Oct 31, 2006
Micropattern shape measuring system and method
HITACHI HIGH TECH CORP0 citations51