Inventor
YEN YU-HUA
TW3 patents
Patents
3 patentsUS9805934B2Oct 31, 2017
Formation of contact/via hole with self-alignment
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11201082B2Dec 14, 2021
Deep trench isolation structure in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10483153B2Nov 19, 2019
Deep trench isolation structure in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60