Inventor
YOSHII YUICHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “YOSHII YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOTO LTD
9 patentsUS9960067B2May 1, 2018
Electrostatic chuck
TOTO LTD17 citations83
US10964577B2Mar 30, 2021
Electrostatic chuck
TOTO LTD2 citations71
US10923382B2Feb 16, 2021
Electrostatic chuck
TOTO LTD4 citations71
US10714373B2Jul 14, 2020
Electrostatic chuck and wafer processing apparatus
TOTO LTD2 citations71
US10373854B2Aug 6, 2019
Electrostatic chuck
TOTO LTD2 citations70
US10607874B2Mar 31, 2020
Electrostatic chuck
TOTO LTD3 citations69
US9093488B2Jul 28, 2015
AC-driven electrostatic chuck
TOTO LTD6 citations67
US10373853B2Aug 6, 2019
Electrostatic chuck and wafer processing apparatus
TOTO LTD1 citations60
US11152244B2Oct 19, 2021
Electrostatic chuck
TOTO LTD1 citations59