Inventor
FAHEY JAMES THOMAS
US5 patents
Patents
5 patentsUS6207787B1Mar 27, 2001
Antireflective coating for microlithography
IBM51 citations92
US5736301AApr 7, 1998
Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used
IBM20 citations89
US5795701AAug 18, 1998
Making of microlithographic structures with an underlayer film containing a thermolyzed azide compound
IBM12 citations72
US5783361AJul 21, 1998
Microlithographic structure with an underlayer film containing a thermolyzed azide compound
IBM10 citations72
US5663036ASep 2, 1997
Microlithographic structure with an underlayer film comprising a thermolyzed azide
IBM11 citations72