Inventor
HONJO ICHIRO
US10 patents
⚠️ This page may combine multiple inventors who share the name “HONJO ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS5430292AJul 4, 1995
Pattern inspection apparatus and electron beam apparatus
FUJITSU LTD152 citations98
US5557105ASep 17, 1996
Pattern inspection apparatus and electron beam apparatus
FUJITSU LTD150 citations97
US6188167B1Feb 13, 2001
Micro electron beam source and a fabrication process thereof
FUJITSU LTD17 citations90
US4789786ADec 6, 1988
Method of projecting photoelectron image
FUJITSU LTD8 citations73
US4748646AMay 31, 1988
X-ray lithography system
FUJITSU LTD17 citations73
US5731228AMar 24, 1998
Method for making micro electron beam source
FUJITSU LTD11 citations71
US6130429AOct 10, 2000
Miniaturized secondary electron detector
FUJITSU LTD15 citations68