P

Inventor

SEARS CHRISTOPHER

US39 patents
⚠️ This page may combine multiple inventors who share the name “SEARS CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

24 patents
US9165742B1Oct 20, 2015

Inspection site preparation

KLA TENCOR CORP21 citations92
US10338013B1Jul 2, 2019

Position feedback for multi-beam particle detector

KLA TENCOR CORP10 citations84
US10276346B1Apr 30, 2019

Particle beam inspector with independently-controllable beams

KLA TENCOR CORP9 citations84
US10096447B1Oct 9, 2018

Electron beam apparatus with high resolutions

KLA TENCOR CORP12 citations84
US10748739B2Aug 18, 2020

Deflection array apparatus for multi-electron beam system

KLA TENCOR CORP4 citations73
US10090131B2Oct 2, 2018

Method and system for aberration correction in an electron beam system

KLA TENCOR CORP3 citations73
US10964522B2Mar 30, 2021

High resolution electron energy analyzer

KLA TENCOR CORP2 citations71
US9513230B2Dec 6, 2016

Apparatus and method for optical inspection, magnetic field and height mapping

KLA TENCOR CORP3 citations71
US10056224B2Aug 21, 2018

Method and system for edge-of-wafer inspection and review

KLA TENCOR CORP3 citations70
US10354832B2Jul 16, 2019

Multi-column scanning electron microscopy system

KLA TENCOR CORP3 citations69
US9934933B1Apr 3, 2018

Extractor electrode for electron source

KLA TENCOR CORP3 citations68
US11087950B2Aug 10, 2021

Charge control device for a system with multiple electron beams

KLA TENCOR CORP1 citations62
US11037753B2Jun 15, 2021

Magnetically microfocused electron emission source

KLA TENCOR CORP0 citations62
US9171694B2Oct 27, 2015

Asymmetric electrostatic quadrupole deflector for improved field uniformity

KLA TENCOR CORP0 citations52
US11302510B2Apr 12, 2022

Space charge insensitive electron gun designs

KLA TENCOR CORP0 citations51
US11302511B2Apr 12, 2022

Field curvature correction for multi-beam inspection systems

KLA TENCOR CORP0 citations50
US9881764B2Jan 30, 2018

Heat-spreading blanking system for high throughput electron beam apparatus

KLA TENCOR CORP0 citations50
US10770258B2Sep 8, 2020

Method and system for edge-of-wafer inspection and review

KLA TENCOR CORP0 citations49
US9232626B2Jan 5, 2016

Wafer grounding using localized plasma source

KLA TENCOR CORP0 citations42
US9892885B2Feb 13, 2018

System and method for drift compensation on an electron beam based characterization tool

KLA TENCOR CORP0 citations41
US10460903B2Oct 29, 2019

Method and system for charge control for imaging floating metal structures on non-conducting substrates

KLA TENCOR CORP0 citations40
US10224177B2Mar 5, 2019

Method and system for aberration correction in an electron beam system

KLA TENCOR CORP0 citations40
US9653257B2May 16, 2017

Method and system for reducing charging artifacts in scanning electron microscopy images

KLA TENCOR CORP0 citations40
US10790114B2Sep 29, 2020

Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages

KLA TENCOR CORP0 citations38

KLA CORP

9 patents

CHOPRA SHELESH

1 patent

SEARS CHRISTOPHER

1 patent

NASSER-GHODSI MEHRAN

1 patent

SHADMAN KHASHAYAR

1 patent

TARVEDA THERAPEUTICS INC

1 patent

NEIL MARK

1 patent