Inventor
SEARS CHRISTOPHER
US39 patents
⚠️ This page may combine multiple inventors who share the name “SEARS CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
24 patentsUS9165742B1Oct 20, 2015
Inspection site preparation
KLA TENCOR CORP21 citations92
US10338013B1Jul 2, 2019
Position feedback for multi-beam particle detector
KLA TENCOR CORP10 citations84
US10276346B1Apr 30, 2019
Particle beam inspector with independently-controllable beams
KLA TENCOR CORP9 citations84
US10096447B1Oct 9, 2018
Electron beam apparatus with high resolutions
KLA TENCOR CORP12 citations84
US10748739B2Aug 18, 2020
Deflection array apparatus for multi-electron beam system
KLA TENCOR CORP4 citations73
US10090131B2Oct 2, 2018
Method and system for aberration correction in an electron beam system
KLA TENCOR CORP3 citations73
US10964522B2Mar 30, 2021
High resolution electron energy analyzer
KLA TENCOR CORP2 citations71
US9513230B2Dec 6, 2016
Apparatus and method for optical inspection, magnetic field and height mapping
KLA TENCOR CORP3 citations71
US10056224B2Aug 21, 2018
Method and system for edge-of-wafer inspection and review
KLA TENCOR CORP3 citations70
US10354832B2Jul 16, 2019
Multi-column scanning electron microscopy system
KLA TENCOR CORP3 citations69
US9934933B1Apr 3, 2018
Extractor electrode for electron source
KLA TENCOR CORP3 citations68
US11087950B2Aug 10, 2021
Charge control device for a system with multiple electron beams
KLA TENCOR CORP1 citations62
US11037753B2Jun 15, 2021
Magnetically microfocused electron emission source
KLA TENCOR CORP0 citations62
US9171694B2Oct 27, 2015
Asymmetric electrostatic quadrupole deflector for improved field uniformity
KLA TENCOR CORP0 citations52
US11302510B2Apr 12, 2022
Space charge insensitive electron gun designs
KLA TENCOR CORP0 citations51
US11302511B2Apr 12, 2022
Field curvature correction for multi-beam inspection systems
KLA TENCOR CORP0 citations50
US9881764B2Jan 30, 2018
Heat-spreading blanking system for high throughput electron beam apparatus
KLA TENCOR CORP0 citations50
US10770258B2Sep 8, 2020
Method and system for edge-of-wafer inspection and review
KLA TENCOR CORP0 citations49
US9232626B2Jan 5, 2016
Wafer grounding using localized plasma source
KLA TENCOR CORP0 citations42
US9892885B2Feb 13, 2018
System and method for drift compensation on an electron beam based characterization tool
KLA TENCOR CORP0 citations41
US10460903B2Oct 29, 2019
Method and system for charge control for imaging floating metal structures on non-conducting substrates
KLA TENCOR CORP0 citations40
US10224177B2Mar 5, 2019
Method and system for aberration correction in an electron beam system
KLA TENCOR CORP0 citations40
US9653257B2May 16, 2017
Method and system for reducing charging artifacts in scanning electron microscopy images
KLA TENCOR CORP0 citations40
US10790114B2Sep 29, 2020
Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages
KLA TENCOR CORP0 citations38
KLA CORP
9 patentsUS11335608B2May 17, 2022
Electron beam system for inspection and review of 3D devices
KLA CORP2 citations73
US11056312B1Jul 6, 2021
Micro stigmator array for multi electron beam system
KLA CORP6 citations73
US11508551B2Nov 22, 2022
Detection and correction of system responses in real-time
KLA CORP2 citations70
US11508591B2Nov 22, 2022
High resolution electron beam apparatus with dual-aperture schemes
KLA CORP0 citations61
US12451319B2Oct 21, 2025
Electron source with magnetic suppressor electrode
KLA CORP0 citations60
US12165831B2Dec 10, 2024
Method and system of image-forming multi-electron beams
KLA CORP1 citations60
US11894214B2Feb 6, 2024
Detection and correction of system responses in real-time
KLA CORP0 citations59
US11651934B2May 16, 2023
Systems and methods of creating multiple electron beams
KLA CORP0 citations58
US12165838B2Dec 10, 2024
Joint electron-optical columns for flood-charging and image-forming in voltage contrast wafer inspections
KLA CORP0 citations52