Inventor
YANG HEDONG
US13 patents
⚠️ This page may combine multiple inventors who share the name “YANG HEDONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS10395362B2Aug 27, 2019
Contour based defect detection
KLA TENCOR CORP24 citations91
US10607119B2Mar 31, 2020
Unified neural network for defect detection and classification
KLA TENCOR CORP8 citations83
US9483819B2Nov 1, 2016
Contour-based array inspection of patterned defects
KLA TENCOR CORP6 citations70
US10790114B2Sep 29, 2020
Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages
KLA TENCOR CORP0 citations38
KLA TENCOR TECH CORP
3 patentsUS7423269B1Sep 9, 2008
Automated feature analysis with off-axis tilting
KLA TENCOR TECH CORP12 citations81
US7173243B1Feb 6, 2007
Non-feature-dependent focusing
KLA TENCOR TECH CORP9 citations73
US6995369B1Feb 7, 2006
Scanning electron beam apparatus and methods of processing data from same
KLA TENCOR TECH CORP7 citations72