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Inventor
SHEPELEV LUDMILA
CA
2 patents
⚠️ This page may combine multiple inventors who share the name “SHEPELEV LUDMILA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH CANADA INC
1 patent
US7781947B2
Aug 24, 2010
Apparatus and methods for producing electromagnetic radiation
MATTSON TECH CANADA INC
7 citations
67
MATTSON TECH INC
1 patent
US8384274B2
Feb 26, 2013
High-intensity electromagnetic radiation apparatus and methods
MATTSON TECH INC
2 citations
57