Inventor
TANIKAWA TAKEHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TANIKAWA TAKEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS11257691B2Feb 22, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD4 citations70
US9048070B2Jun 2, 2015
Dielectric window for plasma treatment device, and plasma treatment device
TOKYO ELECTRON LTD3 citations61
US12230483B2Feb 18, 2025
Deposition method and processing apparatus
TOKYO ELECTRON LTD0 citations60
US11264260B2Mar 1, 2022
Cleaning method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US10825662B2Nov 3, 2020
Method for driving member and processing apparatus
TOKYO ELECTRON LTD1 citations56
US10923328B2Feb 16, 2021
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations54
US11984300B2May 14, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11978614B2May 7, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations48
US11869750B2Jan 9, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations47
US9892951B2Feb 13, 2018
Method of controlling adherence of microparticles to substrate to be processed, and processing apparatus
TOKYO ELECTRON LTD0 citations40
US9728417B2Aug 8, 2017
Method for processing base body to be processed
TOKYO ELECTRON LTD0 citations40