Inventor

HISATSUGU TOKUSHIGE

2 patents

⚠️ This page may combine multiple inventors who share the name “HISATSUGU TOKUSHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

1 patent

US4349409ASep 14, 1982

Method and apparatus for plasma etching

FUJITSU LTD46 citations89

PD SERVICE CORP

1 patent

US6913857B2Jul 5, 2005

Exposure mask, method for manufacturing the mask, and exposure method

PD SERVICE CORP8 citations67