Inventor
LALBAHADOERSING SANJAYSINGH
NL12 patents
⚠️ This page may combine multiple inventors who share the name “LALBAHADOERSING SANJAYSINGH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11086232B2Aug 10, 2021
Mark, overlay target, and methods of alignment and overlay
ASML NETHERLANDS BV5 citations68
US10191390B2Jan 29, 2019
Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus
ASML NETHERLANDS BV2 citations68
US7453161B2Nov 18, 2008
Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus
ASML NETHERLANDS BV3 citations62
US7598024B2Oct 6, 2009
Method and system for enhanced lithographic alignment
ASML NETHERLANDS BV2 citations61
US10948837B2Mar 16, 2021
Information determining apparatus and method
ASML NETHERLANDS BV0 citations57
US11675281B2Jun 13, 2023
Methods of alignment, overlay, configuration of marks, manufacturing of patterning devices and patterning the marks
ASML NETHERLANDS BV0 citations51
US10429750B2Oct 1, 2019
Alignment mark recovery method and lithographic apparatus
ASML NETHERLANDS BV0 citations32