Inventor
NIKIPELOV ANDREY ALEXANDROVICH
NL12 patents
Patents
12 patentsUS10228615B2Mar 12, 2019
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
ASML NETHERLANDS BV17 citations93
US9728931B2Aug 8, 2017
Electron injector and free electron laser
ASML NETHERLANDS BV5 citations81
US10884339B2Jan 5, 2021
Lithographic method
ASML NETHERLANDS BV3 citations72
US11170907B2Nov 9, 2021
Radioisotope production
ASML NETHERLANDS BV4 citations71
US10437154B2Oct 8, 2019
Lithographic method
ASML NETHERLANDS BV2 citations71
US9823572B2Nov 21, 2017
Lithographic method
ASML NETHERLANDS BV2 citations71
US10580545B2Mar 3, 2020
Beam delivery apparatus and method
ASML NETHERLANDS BV6 citations70
US9853412B2Dec 26, 2017
Radiation source
ASML NETHERLANDS BV4 citations69
US10948837B2Mar 16, 2021
Information determining apparatus and method
ASML NETHERLANDS BV0 citations57
US10468225B2Nov 5, 2019
Electron source for a free electron laser
ASML NETHERLANDS BV0 citations50
US10103508B2Oct 16, 2018
Electron injector and free electron laser
ASML NETHERLANDS BV0 citations49
US9952513B2Apr 24, 2018
Undulator
ASML NETHERLANDS BV0 citations39