Inventor
POLYAKOV ALEXEY OLEGOVICH
NL11 patents
Patents
11 patentsUS10342108B2Jul 2, 2019
Metrology methods, radiation source, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations83
US11232960B2Jan 25, 2022
Pick-and-place tool having multiple pick up elements
ASML NETHERLANDS BV2 citations72
US10416555B2Sep 17, 2019
Lithographic patterning process and resists to use therein
ASML NETHERLANDS BV3 citations70
US12271008B2Apr 8, 2025
Transmissive diffusor
ASML NETHERLANDS BV0 citations61
US11415886B2Aug 16, 2022
Lithographic patterning process and resists to use therein
ASML NETHERLANDS BV0 citations59
US11996267B2May 28, 2024
Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system
ASML NETHERLANDS BV1 citations58
US12399428B2Aug 26, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations57
US10948837B2Mar 16, 2021
Information determining apparatus and method
ASML NETHERLANDS BV0 citations57
US12325911B2Jun 10, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations54
US10555407B2Feb 4, 2020
Metrology methods, radiation source, metrology apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US12313980B2May 27, 2025
Inspection system, lithographic apparatus, and inspection method
ASML NETHERLANDS BV0 citations50