Inventor
PETERSON BRENNAN
US17 patents
⚠️ This page may combine multiple inventors who share the name “PETERSON BRENNAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11079687B2Aug 3, 2021
Process window based on defect probability
ASML NETHERLANDS BV11 citations83
US11822255B2Nov 21, 2023
Process window based on defect probability
ASML NETHERLANDS BV0 citations60
US11187994B2Nov 30, 2021
Method for controlling a manufacturing process and associated apparatuses
ASML NETHERLANDS BV0 citations60
US10948837B2Mar 16, 2021
Information determining apparatus and method
ASML NETHERLANDS BV0 citations57
US11087065B2Aug 10, 2021
Method of manufacturing devices
ASML NETHERLANDS BV1 citations52
US12112260B2Oct 8, 2024
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations50
US12169366B2Dec 17, 2024
Voltage contrast metrology mark
ASML NETHERLANDS BV0 citations49
YOUNG RICHARD J
2 patentsFEI CO
2 patentsUS9653260B2May 16, 2017
High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
FEI CO7 citations79
US10283317B2May 7, 2019
High throughput TEM preparation processes and hardware for backside thinning of cross-sectional view lamella
FEI CO0 citations46