Inventor

FARNIA MORTEZA

US2 patents

Patents

2 patents

US6818783B2Nov 16, 2004

Volatile precursors for deposition of metals and metal-containing films

AIR PROD & CHEM31 citations89

US6838573B1Jan 4, 2005

Copper CVD precursors with enhanced adhesion properties

AIR PROD & CHEM7 citations69