Inventor

BOZE MELANIE ANNE

US2 patents

Patents

2 patents

US6869876B2Mar 22, 2005

Process for atomic layer deposition of metal films

AIR PROD & CHEM71 citations95

US6818783B2Nov 16, 2004

Volatile precursors for deposition of metals and metal-containing films

AIR PROD & CHEM31 citations89