Inventor
WELLS CARLTON
US3 patents
Patents
3 patentsUS7033252B2Apr 25, 2006
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH23 citations87
US7238083B2Jul 3, 2007
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH3 citations57
US7131892B2Nov 7, 2006
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH3 citations57