Inventor
KALENIAN BILL
US4 patents
Patents
4 patentsUS5961169AOct 5, 1999
Apparatus for sensing the presence of a wafer
STRASBAUGH76 citations93
US7033252B2Apr 25, 2006
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH23 citations87
US7238083B2Jul 3, 2007
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH3 citations57
US7131892B2Nov 7, 2006
Wafer carrier with pressurized membrane and retaining ring actuator
STRASBAUGH3 citations57