Inventor

NELSON GORDON RAY

US3 patents

Patents

3 patents

US7278813B2Oct 9, 2007

Automated processing system

SEMITOOL INC27 citations90

US6942738B1Sep 13, 2005

Automated semiconductor processing system

SEMITOOL INC35 citations90

US6723174B2Apr 20, 2004

Automated semiconductor processing system

SEMITOOL INC15 citations82