Inventor
PARK GWANGSIK
KR6 patents
Patents
6 patentsUS11726046B2Aug 15, 2023
Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods
SAMSUNG ELECTRONICS CO LTD4 citations70
US12045009B2Jul 23, 2024
Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM
SAMSUNG ELECTRONICS CO LTD0 citations60
US11314205B2Apr 26, 2022
Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM
SAMSUNG ELECTRONICS CO LTD0 citations60
US10699927B1Jun 30, 2020
Inspection apparatus and semiconductor structure-manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US11264256B2Mar 1, 2022
Wafer inspection apparatus
SAMSUNG ELECTRONICS CO LTD0 citations48
US11898912B2Feb 13, 2024
Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations45