Inventor
KIM WOOKRAE
KR17 patents
Patents
17 patentsUS12347096B2Jul 1, 2025
Semiconductor measurement apparatus
SAMSUNG ELECTRONICS CO LTD2 citations73
US12002698B2Jun 4, 2024
Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method
SAMSUNG ELECTRONICS CO LTD4 citations71
US11972960B2Apr 30, 2024
Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method
SAMSUNG ELECTRONICS CO LTD3 citations70
US11726046B2Aug 15, 2023
Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods
SAMSUNG ELECTRONICS CO LTD4 citations70
US12228499B2Feb 18, 2025
Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method
SAMSUNG ELECTRONICS CO LTD0 citations60
US12045009B2Jul 23, 2024
Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM
SAMSUNG ELECTRONICS CO LTD0 citations60
US11604136B2Mar 14, 2023
Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method
SAMSUNG ELECTRONICS CO LTD0 citations60
US11314205B2Apr 26, 2022
Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM
SAMSUNG ELECTRONICS CO LTD0 citations60
US12566144B2Mar 3, 2026
Semiconductor inspection apparatus
SAMSUNG ELECTRONICS CO LTD0 citations49
US10699927B1Jun 30, 2020
Inspection apparatus and semiconductor structure-manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US12455228B2Oct 28, 2025
Semiconductor measurement apparatus
SAMSUNG ELECTRONICS CO LTD0 citations48
US11264256B2Mar 1, 2022
Wafer inspection apparatus
SAMSUNG ELECTRONICS CO LTD0 citations48
US12405226B2Sep 2, 2025
Substrate inspection apparatus and substrate inspection method
SAMSUNG ELECTRONICS CO LTD0 citations47
US12222282B2Feb 11, 2025
Semiconductor measurement apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US12422245B2Sep 23, 2025
Semiconductor measurement apparatus
SAMSUNG ELECTRONICS CO LTD0 citations46
US11624699B2Apr 11, 2023
Measurement system capable of adjusting AOI, AOI spread and azimuth of incident light
SAMSUNG ELECTRONICS CO LTD0 citations45
US12561788B2Feb 24, 2026
Fluorescence microscopy metrology system and method of operating fluorescence microscopy metrology system
SAMSUNG ELECTRONICS CO LTD0 citations41