Inventor

HAMASAKI RYOUJI

JP3 patents

Patents

3 patents

US6849191B2Feb 1, 2005

Method and apparatus for treating surface of semiconductor

HITACHI LTD24 citations92

US6235146B1May 22, 2001

Vacuum treatment system and its stage

HITACHI LTD22 citations92

US6767838B1Jul 27, 2004

Method and apparatus for treating surface of semiconductor

HITACHI LTD11 citations73