Inventor
ISHIZUKA HOTAKA
JP4 patents
Patents
4 patentsUS6465347B2Oct 15, 2002
Tungsten film forming method
TOKYO ELECTRON LTD53 citations94
US6331483B1Dec 18, 2001
Method of film-forming of tungsten
TOKYO ELECTRON LTD13 citations71
US7592256B2Sep 22, 2009
Method of forming tungsten film
TOKYO ELECTRON LTD1 citations51
US7060614B2Jun 13, 2006
Method for forming film
TOKYO ELECTRON LTD1 citations50