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Inventor
ONOYAMA AYUMU
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “ONOYAMA AYUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
2 patents
US6829047B2
Dec 7, 2004
Defect detection system
MITSUBISHI ELECTRIC CORP
15 citations
82
US7065238B2
Jun 20, 2006
Defect inspection method and defect inspection equipment
MITSUBISHI ELECTRIC CORP
3 citations
58
NAKATA KAZUNARI
1 patent
US8435417B2
May 7, 2013
Method of manufacturing semiconductor device
NAKATA KAZUNARI
1 citations
48