Inventor

DINU-GÜRTLER LAURA

NL4 patents

⚠️ This page may combine multiple inventors who share the name “DINU-GÜRTLER LAURA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAPPER LITHOGRAPHY IP BV

3 patents

US8916837B2Dec 23, 2014

Charged particle lithography system with intermediate chamber

MAPPER LITHOGRAPHY IP BV4 citations71

US9466453B2Oct 11, 2016

Cathode arrangement, electron gun, and lithography system comprising such electron gun

MAPPER LITHOGRAPHY IP BV2 citations56

US9455112B2Sep 27, 2016

Cathode arrangement, electron gun, and lithography system comprising such electron gun

MAPPER LITHOGRAPHY IP BV1 citations56

ASML NETHERLANDS BV

1 patent

US10622188B2Apr 14, 2020

Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun

ASML NETHERLANDS BV0 citations46