Inventor

OHATA TATSUHIRO

JP3 patents

Patents

3 patents

US10734485B2Aug 4, 2020

Gallium nitride substrate and manufacturing method of nitride semiconductor crystal

MITSUBISHI CHEM CORP1 citations71

US11670687B2Jun 6, 2023

Gallium nitride substrate and manufacturing method of nitride semiconductor crystal

MITSUBISHI CHEM CORP0 citations61

US9673046B2Jun 6, 2017

Gallium nitride substrate and manufacturing method of nitride semiconductor crystal

MITSUBISHI CHEM CORP1 citations61