Inventor
ZHANG PALLAVI
US4 patents
Patents
4 patentsUS10770321B2Sep 8, 2020
Process kit erosion and service life prediction
APPLIED MATERIALS INC4 citations70
US10177018B2Jan 8, 2019
Process kit erosion and service life prediction
APPLIED MATERIALS INC4 citations70
US10541169B2Jan 21, 2020
Method and system for balancing the electrostatic chucking force on a substrate
APPLIED MATERIALS INC0 citations48
US10332773B2Jun 25, 2019
Transparent electrostatic carrier
APPLIED MATERIALS INC0 citations47