Inventor

HARDY MATTHEW T

US3 patents

⚠️ This page may combine multiple inventors who share the name “HARDY MATTHEW T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

US NAVY

1 patent

US10283597B2May 7, 2019

Scandium-containing III-N etch-stop layers for selective etching of III-nitrides and related materials

US NAVY3 citations69

US GOV SEC NAVY

1 patent

US11831295B2Nov 28, 2023

Multifunctional integrated acoustic devices and systems using epitaxial materials

US GOV SEC NAVY2 citations64

HARDY MATTHEW T

1 patent

US8772758B2Jul 8, 2014

Suppression of inclined defect formation and increase in critical thickness by silicon doping on non-c-plane (Al,Ga,In)N

HARDY MATTHEW T3 citations56