Inventor
KIM DOO SAN
KR5 patents
Patents
5 patentsUS10593819B2Mar 17, 2020
Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film
RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV2 citations71
US10916670B2Feb 9, 2021
Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film
RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV0 citations60
US11127570B2Sep 21, 2021
Plasma source and plasma generation apparatus using the same
RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV0 citations59
US12148626B2Nov 19, 2024
Dry etching method using potential control of grid and substrate
RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV1 citations54
US11120975B2Sep 14, 2021
Ion beam etching apparatus
RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV0 citations45