Inventor
TAKAYANAGI FUMIKAZU
JP3 patents
Patents
3 patentsUS6937040B2Aug 30, 2005
Probe module and a testing apparatus
ADVANTEST CORP71 citations95
US7554136B2Jun 30, 2009
Micro-switch device and method for manufacturing the same
ADVANTEST CORP3 citations58
US7477003B2Jan 13, 2009
Bimorph element, bimorph switch, mirror element, and method for manufacturing these
ADVANTEST CORP6 citations57