Inventor
Van Der Star Gido
BE8 patents
Patents
8 patentsUS9887082B1Feb 6, 2018
Method and apparatus for filling a gap
ASM IP HOLDING BV466 citations98
US10741385B2Aug 11, 2020
Method and apparatus for filling a gap
ASM IP HOLDING BV1 citations73
US11898243B2Feb 13, 2024
Method of forming vanadium nitride-containing layer
ASM IP HOLDING BV2 citations69
US11990333B2May 21, 2024
Method and apparatus for filling a gap
ASM IP HOLDING BV0 citations62
US11694892B2Jul 4, 2023
Method and apparatus for filling a gap
ASM IP HOLDING BV0 citations62
US11107676B2Aug 31, 2021
Method and apparatus for filling a gap
ASM IP HOLDING BV0 citations62
US12448683B2Oct 21, 2025
Method of forming a vanadium nitride-containing layer
ASM IP HOLDING BV0 citations59
US11830730B2Nov 28, 2023
Layer forming method and apparatus
ASM IP HOLDING BV0 citations44