Inventor
SUE KIWAMU
JP3 patents
⚠️ This page may combine multiple inventors who share the name “SUE KIWAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIST
2 patentsUS12153347B2Nov 26, 2024
Organically modified metal oxide nanoparticle, method for producing the same, EUV photoresist material, and method for producing etching mask
AIST1 citations51
US11747724B2Sep 5, 2023
Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method
AIST0 citations44