Inventor
OHNO KOICHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “OHNO KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
3 patentsUS4871237AOct 3, 1989
Method and apparatus for adjusting imaging performance of projection optical apparatus
NIKON CORP88 citations94
US4803524AFeb 7, 1989
Method of and apparatus for detecting the accuracy of superposition exposure in an exposure apparatus
NIKON CORP27 citations92
US4965630AOct 23, 1990
Projection exposure apparatus
NIKON CORP50 citations91