Inventor
ENDO SHUNICHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ENDO SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6215087B1Apr 10, 2001
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD57 citations95
US6429518B1Aug 6, 2002
Semiconductor device having a fluorine-added carbon film as an inter-layer insulating film
TOKYO ELECTRON LTD42 citations92
US6355902B2Mar 12, 2002
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD23 citations92
US6218299B1Apr 17, 2001
Semiconductor device and method for producing the same
TOKYO ELECTRON LTD47 citations92
US6727182B2Apr 27, 2004
Process for the production of semiconductor device
TOKYO ELECTRON LTD2 citations62
US6468603B1Oct 22, 2002
Plasma film forming method utilizing varying bias electric power
TOKYO ELECTRON LTD2 citations62