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Inventor
SHURTLIFF ERIC C
US
2 patents
Patents
2 patents
US5975094A
Nov 2, 1999
Method and apparatus for enhanced cleaning of a workpiece with mechanical energy
SPEEDFAM CORP
45 citations
86
US5870792A
Feb 16, 1999
Apparatus for cleaning wafers and discs
SPEEDFAM CORP
19 citations
86